Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma
- 期刊名称Applied Physics Letters
- 作者Moshkalyov, S. A.; Steen, P. G.; Gomez, S.; Graham, W. G.
- 卷第75卷
- 期第3期
- 印刷ISSN0003-6951
- 文件大小300.77KB
- 发表时间1999
- DOI10.1063/1.124365
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