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Controller design issues in the feedback control of radio frequency plasma processing reactors

Controller design issues in the feedback control of radio frequency plasma processing reactors

Rauf, Shahid; Kushner, Mark J.

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Rauf, Shahid; Kushner, Mark J.
卷第17卷
期第3期
印刷ISSN0734-2101
文件大小576.41KB
发表时间1999
DOI10.1116/1.581690

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