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Selective growth on facets and in situ mask removal for regrowth

Selective growth on facets and in situ mask removal for regrowth

Kumar Shiralagi; Ruth Zhang; Raymond Tsui
  • 作者Kumar Shiralagi; Ruth Zhang; Raymond Tsui
  • 印刷ISSN0022-0248
  • 文件大小302.21KB
  • 发表时间1999
  • DOI10.1016/s0022-0248(98)01417-1
  • 页码590-593
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