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[ACM Press the 31st conference - Phoenix, Arizona, United States (1999.12.05-1999.12.08)] Proceedings of the 31st conference on Winter simulation Simulation---a bridge to the future - WSC '99 - Operational simulation of an x-ray lithography cell

[ACM Press the 31st conference - Phoenix, Arizona, United States (1999.12.05-1999.12.08)] Proceedings of the 31st conference on Winter simulation Simulation---a bridge to the future - WSC '99 - Operational simulation of an x-ray lithography cell

White, K. Preston; Trybula, Walter J.

作者White, K. Preston; Trybula, Walter J.
卷第1卷
文件大小135.68KB
发表时间1999
DOI10.1145/324138.324540
页码865-874

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