High perfection chirped grating phase masks by electron-beam definition
- 作者C. Rogers; D. Goodchild; R. Baulcomb; M. Butler; P. Hoyle; S. Kanellopoulos; S. Clements; B. Pugh
- 文件大小628.58KB
- 发表时间1999
- DOI10.1116/1.590983
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