Overlay budget analysis for the 100 nm device generation
- 作者K. Simon; O. Vladimirsky; Y. Vladimirsky; F. Cerrina
- 卷第46卷
- 印刷ISSN0167-9317
- 文件大小405.62KB
- 发表时间1999
- DOI10.1016/s0167-9317(99)00039-8
- 页码457-460
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