Design considerations for low damage process plasmas

M. Rahman; L.G. Deng; A. Boyd; A. Ribayrol; C.D.W. Wilkinson; J.A. van den Berg; D.G. Armour

作者M. Rahman; L.G. Deng; A. Boyd; A. Ribayrol; C.D.W. Wilkinson; J.A. van den Berg; D.G. Armour
卷第46卷
印刷ISSN0167-9317
文件大小315.25KB
发表时间1999
DOI10.1016/s0167-9317(99)00086-6
页码299-302

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