Growth and Structure of Metallic Barrier Layer and Interconnect Films I: Exeriments
Windt, D. L.; Tortre, J. Dalla; Gilmer, G. H.; Sapjeta, J.; Kalyanaraman, R.; Baumann, F. H.; O'Sullivan, P. L.; Dunn, D.; Hull, R
- 期刊名称MRS Proceedings
- 作者Windt, D. L.; Tortre, J. Dalla; Gilmer, G. H.; Sapjeta, J.; Kalyanaraman, R.; Baumann, F. H.; O'Sullivan, P. L.; Dunn, D.; Hull, R
- 卷第562卷
- 电子ISSN1946-4274
- 文件大小1601.98KB
- 发表时间1999-1
- DOI10.1557/proc-562-263