Structure and Bonding in Nitrided Oxide Films by Sims and Xps
- 期刊名称MRS Proceedings
- 作者Novak, S. W.; Shallenberger, J. R.; Cole, D. A.; Marino, J.W.
- 卷第567卷
- 电子ISSN1946-4274
- 文件大小2525.25KB
- 发表时间1999-1
- DOI10.1557/proc-567-579
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