Low Temperature Chemical Vapor Deposition of Titanium Nitride Thin Films With Hydrazine and Tetrakis-(dimethylamide)Titanium
- 期刊名称MRS Proceedings
- 作者Amato-Wierda, Carmela; Norton, Edward T.; Wierda, Derk A.
- 卷第606卷
- 电子ISSN1946-4274
- 文件大小342.46KB
- 发表时间1999-1
- DOI10.1557/proc-606-91