SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Electronics and Structures for MEMS - Novel fiber-to-waveguide coupling method using silicon-on-insulator micromachining techniques
Ngo, Nam Quoc; Rosa, Michel A.; Sweatman, Denis R.; Dimitrijev, Sima; Harrison, H. Barry; Titmarsh, Andrew; Bergmann, Neil W.; Reinhold, Olaf; Tien, Norman C.
- 作者Ngo, Nam Quoc; Rosa, Michel A.; Sweatman, Denis R.; Dimitrijev, Sima; Harrison, H. Barry; Titmarsh, Andrew; Bergmann, Neil W.; Reinhold, Olaf; Tien, Norman C.
- 卷第3891卷
- 印刷ISSN0277-786X
- 文件大小2365.40KB
- 发表时间1999
- DOI10.1117/12.364468
- 页码385-394