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Measurement of Stress and Strain of Single-Crystal-Silicon Thin Film during On-Chip Tensile Test

Measurement of Stress and Strain of Single-Crystal-Silicon Thin Film during On-Chip Tensile Test

Ando, Taeko; Yoshioka, Tetsuo; Shikida, Mitsuhiro; Sato, Kazuo; Kawabata, Tatsuo
  • 期刊名称IEEJ Transactions on Sensors and Micromachines
  • 作者Ando, Taeko; Yoshioka, Tetsuo; Shikida, Mitsuhiro; Sato, Kazuo; Kawabata, Tatsuo
  • 卷第119卷
  • 期第2期
  • 印刷ISSN1341-8939
  • 电子ISSN1347-5525
  • 文件大小4691.72KB
  • 发表时间1999
  • DOI10.1541/ieejsmas.119.67
  • 页码67-72
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