Selective Area Growth (SAG) and Epitaxial Lateral Overgrowth (ELO) of GaN using Tungsten Mask

Kawaguchi, Yasutoshi; Nambu, Shingo; Sone, Hiroki; Yamaguchi, Masahito; Miyake, Hideto; Hiramatsu, Kazumasa; Sawaki, Nobuhiko; Iyechika, Yasushi; Maeda, Takayoshi

期刊名称MRS Internet Journal of Nitride Semiconductor Research
作者Kawaguchi, Yasutoshi; Nambu, Shingo; Sone, Hiroki; Yamaguchi, Masahito; Miyake, Hideto; Hiramatsu, Kazumasa; Sawaki, Nobuhiko; Iyechika, Yasushi; Maeda, Takayoshi
卷第4卷
电子ISSN1092-5783
文件大小208.34KB
发表时间1999
DOI10.1557/s1092578300002866
页码441-446

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Selective Area Growth (SAG) and Epitaxial Lateral Overgrowth (ELO) of GaN using Tungsten Mask