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Spike models for sputtering: Effect of the surface and the material stiffness

Spike models for sputtering: Effect of the surface and the material stiffness

E.M. Bringa; M. Jakas; R.E. Johnson

作者E.M. Bringa; M. Jakas; R.E. Johnson
印刷ISSN0168-583X
文件大小499.48KB
发表时间2000
DOI10.1016/s0168-583x(99)01068-x
页码762-771

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