Gas phase and surface kinetic schemes for metal organic chemical vapor deposition processes: a theoretical perspective

• 作者Carlo Cavallotti; Maurizio Masi; Sergio Carrà
• 卷第66卷
• 印刷ISSN0254-0584
• 文件大小196.34KB
• 发表时间2000
• DOI10.1016/s0254-0584(00)00320-5
• 页码197-200