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Silane Flow Rate Dependence of SiO[sub x] Cap Layer Induced Impurity-Free Intermixing of GaAs/AlGaAs Quantum Wells

Deenapanray, Prakash N. K.; Tan, H. H.; Cohen, Michael I.; Gaff, Keith; Petravic, Mladen; Jagadish, C.

期刊名称Journal of The Electrochemical Society
作者Deenapanray, Prakash N. K.; Tan, H. H.; Cohen, Michael I.; Gaff, Keith; Petravic, Mladen; Jagadish, C.
卷第147卷
期第5期
印刷ISSN0013-4651
文件大小411.46KB
发表时间2000
DOI10.1149/1.1393464