Kinetic investigation of copper film oxidation by spectroscopic ellipsometry and reflectometry
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Hu, Yao Zhi; Sharangpani, Rahul; Tay, Sing-Pin
- 卷第18卷
- 期第5期
- 印刷ISSN0734-2101
- 文件大小566.85KB
- 发表时间2000
- DOI10.1116/1.1287156
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