Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma
O. Zabeida; A. Hallil; M. R. Wertheimer; L. Martinu
- 作者O. Zabeida; A. Hallil; M. R. Wertheimer; L. Martinu
- 卷第88卷
- 期第2期
- 文件大小676.84KB
- 发表时间2000
- DOI10.1063/1.373714