Nonlinear amplitude evolution during spontaneous patterning of ion-bombarded Si(001)
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Erlebacher, Jonah; Aziz, Michael J.; Chason, Eric; Sinclair, Michael B.; Floro, Jerrold A.
- 卷第18卷
- 期第1期
- 印刷ISSN0734-2101
- 文件大小516.55KB
- 发表时间2000
- DOI10.1116/1.582127
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