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[IEEE ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science - New Orleans, LA, USA (4-7 June 2000)] ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) - Two-dimensional simulation of ion energy and angular distributions at the wafer in low-pressure RF discharges

[IEEE ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science - New Orleans, LA, USA (4-7 June 2000)] ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) - Two-dimensional simulation of ion energy and angular distributions at the wafer in low-pressure RF discharges

Hu, Y.; Lin, T.L.; Huang, C.Y.
  • 作者Hu, Y.; Lin, T.L.; Huang, C.Y.
  • 文件大小76.20KB
  • 发表时间2000
  • DOI10.1109/plasma.2000.854722
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