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Ion fluxes and energies in inductively coupled radio-frequency discharges containing C[sub 2]F[sub 6] and c-C[sub 4]F[sub 8]

Ion fluxes and energies in inductively coupled radio-frequency discharges containing C[sub 2]F[sub 6] and c-C[sub 4]F[sub 8]

A. N. Goyette; Y. Wang; M. Misakian; J. K. Olthoff
  • 作者A. N. Goyette; Y. Wang; M. Misakian; J. K. Olthoff
  • 文件大小482.47KB
  • 发表时间2000
  • DOI10.1116/1.1308590
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