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Dual-doped TMAH silicon etchant for microelectromechanical structures and systems applications

Dual-doped TMAH silicon etchant for microelectromechanical structures and systems applications

M. Paranjape; A. Pandy; S. Brida; L. Landsberger; M. Kahrizi; M. Zen

作者M. Paranjape; A. Pandy; S. Brida; L. Landsberger; M. Kahrizi; M. Zen
文件大小980.42KB
发表时间2000
DOI10.1116/1.582169

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