Effect of hydrogen dilution on the structure of SiOF films prepared by remote plasma enhanced chemical vapor deposition from SiF[sub 4]-based plasmas
- 作者J. C. Alonso; E. Pichardo; V. Pankov; A. Ortiz
- 文件大小616.11KB
- 发表时间2000
- DOI10.1116/1.1308593
[IEEE 2012 Fifth International Joint Conference on Computational Sciences and Optimization (CSO) - Harbin, Heilongjiang, China (2012.06.23-2012.06.26)] 2012 Fifth International Joint Conference on Computational Sciences and Optimization - CSO 2012: 2012 Fifth International Joint Conference on Computational Sciences and Optimization [Cover art]2012
[IEEE 2012 Fifth International Joint Conference on Computational Sciences and Optimization (CSO) - Harbin, Heilongjiang, China (2012.06.23-2012.06.26)] 2012 Fifth International Joint Conference on Computational Sciences and Optimization - Reviewers2012
[IEEE 2012 Fifth International Joint Conference on Computational Sciences and Optimization (CSO) - Harbin, Heilongjiang, China (2012.06.23-2012.06.26)] 2012 Fifth International Joint Conference on Computational Sciences and Optimization - Organizing Committee2012
[IEEE 2012 Fifth International Joint Conference on Computational Sciences and Optimization (CSO) - Harbin, Heilongjiang, China (2012.06.23-2012.06.26)] 2012 Fifth International Joint Conference on Computational Sciences and Optimization - [Copyright notice]2012
[IEEE 2012 Fifth International Joint Conference on Computational Sciences and Optimization (CSO) - Harbin, Heilongjiang, China (2012.06.23-2012.06.26)] 2012 Fifth International Joint Conference on Computational Sciences and Optimization - Program Committees2012
[IEEE 2012 Fifth International Joint Conference on Computational Sciences and Optimization (CSO) - Harbin, Heilongjiang, China (2012.06.23-2012.06.26)] 2012 Fifth International Joint Conference on Computational Sciences and Optimization - Author index2012
[IEEE 2012 Fifth International Joint Conference on Computational Sciences and Optimization (CSO) - Harbin, Heilongjiang, China (2012.06.23-2012.06.26)] 2012 Fifth International Joint Conference on Computational Sciences and Optimization - Table of contents2012
[IEEE 2012 Fifth International Joint Conference on Computational Sciences and Optimization (CSO) - Harbin, Heilongjiang, China (2012.06.23-2012.06.26)] 2012 Fifth International Joint Conference on Computational Sciences and Optimization - [Title page iii]2012