发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

Self-Consistent Particle Simulation of Radio Frequency CF
<sub/>4</sub>
Discharge: Effect of Gas Pressure

Self-Consistent Particle Simulation of Radio Frequency CF ₄ Discharge: Effect of Gas Pressure

Denpoh, Kazuki; Nanbu, Kenichi

期刊名称Japanese Journal of Applied Physics
作者Denpoh, Kazuki; Nanbu, Kenichi
卷第39卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小109.49KB
发表时间2000-5-15
DOI10.1143/jjap.39.2804
页码2804-2808

← 返回【学霸图书馆】主页