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[IEEE 2000 10th International Crimean Microwave Conference. Microwave and Telecommunication Technology. Conference Proceedings - Crimea, Ukraine (2000.9.11-2000.9.15)] 2000 10th International Crimean Microwave Conference.

[IEEE 2000 10th International Crimean Microwave Conference. Microwave and Telecommunication Technology. Conference Proceedings - Crimea, Ukraine (2000.9.11-2000.9.15)] 2000 10th International Crimean Microwave Conference. "Microwave and Telecommunication Technology". Conference Proceedings (IEEE Cat. No.00EX415) - Spectral examination of the "loading" effect while removing the photoresist coatings from the substrate surfaces in the microwave plasma discharge

Bordusov, S.V.
  • 作者Bordusov, S.V.
  • 文件大小340.49KB
  • 发表时间2000
  • DOI10.1109/crmico.2000.1256172
  • 页码436-437
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