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Precursor design for liquid Injection CVD of lead scandium tantalate thin films

Precursor design for liquid Injection CVD of lead scandium tantalate thin films

Jones, Anthony C.; Davies, Hywel O.; Leedham, Timothy J.; Wright, Peter J.; Lane, Penelope A.; Crosbie, Michael J.; Williams, Dennis J.; Jones, Jason C.; Reeves, Christopher L.
  • 期刊名称Integrated Ferroelectrics
  • 作者Jones, Anthony C.; Davies, Hywel O.; Leedham, Timothy J.; Wright, Peter J.; Lane, Penelope A.; Crosbie, Michael J.; Williams, Dennis J.; Jones, Jason C.; Reeves, Christopher L.
  • 卷第30卷
  • 印刷ISSN1058-4587
  • 电子ISSN1607-8489
  • 文件大小322.42KB
  • 发表时间2000-10
  • DOI10.1080/10584580008222249
  • 页码19-26
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