Chemical vapor deposition of titanium nitride thin films from tetrakis(dimethylamido)titanium and hydrazine as a coreactant
- 期刊名称Journal of Materials Research
- 作者Amato-Wierda, Carmela; Wierda, Derk A.
- 卷第15卷
- 期第11期
- 印刷ISSN0884-2914
- 电子ISSN2044-5326
- 文件大小333.04KB
- 发表时间2000-11
- DOI10.1557/JMR.2000.0347
- 页码2414-2424
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