Dopant diffusion during rapid thermal oxidation
- 作者A Stadler; T Sulima; J Schulze; C Fink; A Kottantharayil; W Hansch; H Baumgärtner; I Eisele; W Lerch
- 卷第44卷
- 期第5期
- 印刷ISSN0038-1101
- 文件大小330.69KB
- 发表时间2000
- DOI10.1016/s0038-1101(99)00287-7
- 页码831-835
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