Composition and Morphology Control of Si-C-N Powders by CVD Method
- 期刊名称Key Engineering Materials
- 作者Kavecký, Štefan; Janeková, B.; Šajgalík, Pavol
- 电子ISSN1662-9795
- 文件大小558.28KB
- 发表时间2000
- DOI10.4028/www.scientific.net/KEM.175-176.49
- 页码49-56
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