Fabrication of nanostructures using a UV-based imprint technique
M. Bender; M. Otto; B. Hadam; B. Vratzov; B. Spangenberg; H. Kurz
- 作者M. Bender; M. Otto; B. Hadam; B. Vratzov; B. Spangenberg; H. Kurz
- 卷第53卷
- 印刷ISSN0167-9317
- 文件大小888.25KB
- 发表时间2000
- DOI10.1016/s0167-9317(00)00304-x
- 页码233-236