Incubation time for chemical vapor deposition of copper from hexafluoroacetylacetonate–copper(I)–vinyltrimethoxysilane

• 作者Lu-Sheng Hong; Muh-Gueng Jeng
• 卷第161卷
• 印刷ISSN0169-4332
• 文件大小285.75KB
• 发表时间2000
• DOI10.1016/s0169-4332(00)00278-6
• 页码149-154