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Metal–organic chemical vapour deposition of lead scandium tantalate: chemical issues and precursor selection

Metal–organic chemical vapour deposition of lead scandium tantalate: chemical issues and precursor selection

Anthony C Jones; Timothy J Leedham; Hywel O Davies; Kirsty A Fleeting; Paul O’Brien; Michael J Crosbie; Peter J Wright; Dennis J Williams; Penelope A Lane
  • 作者Anthony C Jones; Timothy J Leedham; Hywel O Davies; Kirsty A Fleeting; Paul O’Brien; Michael J Crosbie; Peter J Wright; Dennis J Williams; Penelope A Lane
  • 卷第19卷
  • 期第3期
  • 印刷ISSN0277-5387
  • 文件大小126.22KB
  • 发表时间2000
  • DOI10.1016/s0277-5387(99)00365-4
  • 页码351-355
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