Mixing effect on a nonequilibrium RF induction plasma
H. Nishiyama; Takehiko Sato; S. Ito; Takeshi Sato; S. Kamiyama
- 作者H. Nishiyama; Takehiko Sato; S. Ito; Takeshi Sato; S. Kamiyama
- 卷第36卷
- 期第5期
- 印刷ISSN0947-7411
- 电子ISSN1432-1181
- 文件大小228.57KB
- 发表时间2000-09
- DOI10.1007/s002310000102
- 页码433-437