Patterning Properties of Lead Zirconate Titanate (PZT) Thick Films Made by Aerosol Deposition
Lebedev, Maxim; Akedo, Jun
- 期刊名称IEEJ Transactions on Sensors and Micromachines
- 作者Lebedev, Maxim; Akedo, Jun
- 卷第120卷
- 期第12期
- 印刷ISSN1341-8939
- 电子ISSN1347-5525
- 文件大小1666.42KB
- 发表时间2000
- DOI10.1541/ieejsmas.120.600
- 页码600-601