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Patterning Properties of Lead Zirconate Titanate (PZT) Thick Films Made by Aerosol Deposition

Patterning Properties of Lead Zirconate Titanate (PZT) Thick Films Made by Aerosol Deposition

Lebedev, Maxim; Akedo, Jun
  • 期刊名称IEEJ Transactions on Sensors and Micromachines
  • 作者Lebedev, Maxim; Akedo, Jun
  • 卷第120卷
  • 期第12期
  • 印刷ISSN1341-8939
  • 电子ISSN1347-5525
  • 文件大小1666.42KB
  • 发表时间2000
  • DOI10.1541/ieejsmas.120.600
  • 页码600-601
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