Structural studies of amorphous and crystallized tungsten nitride thin films by EFED, XRD and TEM
- 作者Y.G Shen; Y.W Mai
- 卷第167卷
- 印刷ISSN0169-4332
- 文件大小809.61KB
- 发表时间2000
- DOI10.1016/s0169-4332(00)00508-0
- 页码59-68
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