ChemInform Abstract: Low Temperature Chemical Vapor Deposition of Titanium Nitride Thin Films with Hydrazine and Tetrakis(dimethylamido)titanium (TDMAT).
- 作者Carmela Amato-Wierda; Edward T. Norton Jr.; Derk A. Wierda
- 卷第31卷
- 期第8期
- 印刷ISSN0931-7597
- 电子ISSN1522-2667
- 文件大小34.25KB
- 发表时间2000
- DOI10.1002/chin.200008272
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