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Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection

Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection

E. I. Rau; A. V. Gostev; Zhu Shiqiu; D. Phang; D. Chan; D. Thong; W. Wong

作者E. I. Rau; A. V. Gostev; Zhu Shiqiu; D. Phang; D. Chan; D. Thong; W. Wong
卷第30卷
期第4期
印刷ISSN1063-7397
电子ISSN1608-3415
文件大小256.58KB
发表时间2001-07
DOI10.1023/a:1011336726819
页码207-218

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