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Characterization and application of a UV-based imprint technique

Characterization and application of a UV-based imprint technique

M. Otto; M. Bender; B. Hadam; B. Spangenberg; H. Kurz

作者M. Otto; M. Bender; B. Hadam; B. Spangenberg; H. Kurz
印刷ISSN0167-9317
文件大小623.74KB
发表时间2001
DOI10.1016/s0167-9317(01)00536-6
页码361-366

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