Characteristics of Indium Tin Oxide Films Deposited by DC and RF Magnetron Sputtering
- 期刊名称Japanese Journal of Applied Physics
- 作者Deng, Wenli; Ohgi, Taizo; Nejo, Hitoshi; Fujita, Daisuke
- 卷第40卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小2280.77KB
- 发表时间2001-5-15
- DOI10.1143/jjap.40.3364
- 页码3364-3369
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