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$Real-time/in situ diffraction study of phase and microstructural evolution in sputtered β-Ta/Ta[sub 2]O[sub 5] films$

Real-time/in situ diffraction study of phase and microstructural evolution in sputtered β-Ta/Ta[sub 2]O[sub 5] films

Whitacre, J. F.; Yalisove, S. M.; Bilello, J. C.

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Whitacre, J. F.; Yalisove, S. M.; Bilello, J. C.
卷第19卷
期第6期
印刷ISSN0734-2101
文件大小2002.00KB
发表时间2001
DOI10.1116/1.1414119

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