Direct observation of a critical length effect in dual-damascene Cu/oxide interconnects
- 期刊名称Applied Physics Letters
- 作者Ogawa, Ennis T.; Bierwag, Alexander J.; Lee, Ki-Don; Matsuhashi, Hideki; Justison, Patrick R.; Ramamurthi, Anup N.; Ho, Paul S.; Blaschke, Volker A.; Griffiths, David; Nelsen, Anne; Breen, Mark; Havemann, Robert H.
- 卷第78卷
- 期第18期
- 印刷ISSN0003-6951
- 文件大小575.38KB
- 发表时间2001
- DOI10.1063/1.1365414
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