Fabrication of GaN suspended microstructures
- 期刊名称Applied Physics Letters
- 作者Strittmatter, R. P.; Beach, R. A.; McGill, T. C.
- 卷第78卷
- 期第21期
- 印刷ISSN0003-6951
- 文件大小430.59KB
- 发表时间2001
- DOI10.1063/1.1364504
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