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[IEEE IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference - Las Vegas, NV, USA (17-22 June 2001)] IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) - Two-dimensional simulation of ion energy and angular distributions at the wafer in RF biased inductively coupled chlorine plasmas

[IEEE IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference - Las Vegas, NV, USA (17-22 June 2001)] IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) - Two-dimensional simulation of ion energy and angular distributions at the wafer in RF biased inductively coupled chlorine plasmas

Lin, W.C.; Hu, Y.; Lin, T.L.
  • 作者Lin, W.C.; Hu, Y.; Lin, T.L.
  • 文件大小57.39KB
  • 发表时间2001
  • DOI10.1109/ppps.2001.961275
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