Low energy O[sub 2][sup +] and N[sub 2][sup +] beam-induced profile broadening effects in Si
Deenapanray, Prakash N. K.; Petravic, Mladen
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Deenapanray, Prakash N. K.; Petravic, Mladen
- 卷第19卷
- 期第3期
- 印刷ISSN0734-2101
- 文件大小368.12KB
- 发表时间2001
- DOI10.1116/1.1354602