Physical and Electrical Characteristics of F- and C-Doped Low Dielectric Constant Chemical Vapor Deposited Oxides
- 期刊名称Journal of The Electrochemical Society
- 作者Wu, Zhen-Cheng; Shiung, Zhi-Wen; Chiang, Chiu-Chih; Wu, Wei-Hao; Chen, Mao-Chieh; Jeng, Shwang-Ming; Chang, Weng; Chou, Pei-Fen; Jang, Syun-Ming; Yu, Chen-Hua; Liang, Mong-Song
- 卷第148卷
- 期第6期
- 印刷ISSN0013-4651
- 文件大小221.09KB
- 发表时间2001
- DOI10.1149/1.1368108
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