Nanoimprint Lithography and Lithographically Induced Self-Assembly
- 期刊名称MRS Bulletin
- 作者Chou, Stephen Y.
- 卷第26卷
- 期第7期
- 印刷ISSN0883-7694
- 电子ISSN1938-1425
- 文件大小4900.72KB
- 发表时间2001-7
- DOI10.1557/mrs2001.122
- 页码512-517
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