Physical and Electrical Characteristics of Methylsilane- and Trimethylsilane-Doped Low Dielectric Constant Chemical Vapor Deposited Oxides

Wu, Zhen-Cheng; Shiung, Zhi-Wen; Chiang, Chiu-Chih; Wu, Wei-Hao; Chen, Mao-Chieh; Jeng, Shwang-Ming; Chang, Weng; Chou, Pei-Fen; Jang, Syun-Ming; Yu, Chen-Hua; Liang, Mong-Song

期刊名称Journal of The Electrochemical Society
作者Wu, Zhen-Cheng; Shiung, Zhi-Wen; Chiang, Chiu-Chih; Wu, Wei-Hao; Chen, Mao-Chieh; Jeng, Shwang-Ming; Chang, Weng; Chou, Pei-Fen; Jang, Syun-Ming; Yu, Chen-Hua; Liang, Mong-Song
卷第148卷
期第6期
印刷ISSN0013-4651
文件大小262.43KB
发表时间2001
DOI10.1149/1.1369373

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Physical and Electrical Characteristics of Methylsilane- and Trimethylsilane-Doped Low Dielectric Constant Chemical Vapor Deposited Oxides