Surface Chemistry Studies of Copper Chemical Mechanical Planarization
- 期刊名称Journal of The Electrochemical Society
- 作者Hernandez, J.; Wrschka, P.; Oehrlein, G. S.
- 卷第148卷
- 期第7期
- 印刷ISSN0013-4651
- 文件大小676.70KB
- 发表时间2001
- DOI10.1149/1.1377595
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