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Lattice Strain around Platelet Oxide Precipitates in C- and N-Doped Silicon Epitaxial Wafers

Lattice Strain around Platelet Oxide Precipitates in C- and N-Doped Silicon Epitaxial Wafers

Yonemura, Mitsuharu; Sueoka, Koji; Kamei, Kazuhito

期刊名称Journal of The Electrochemical Society
作者Yonemura, Mitsuharu; Sueoka, Koji; Kamei, Kazuhito
卷第148卷
期第11期
印刷ISSN0013-4651
文件大小1048.46KB
发表时间2001
DOI10.1149/1.1407248

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