Growth and Characterization of Rapid Thermal Chlorinated Oxides Grown Using In Situ Generated HCl
- 期刊名称Journal of The Electrochemical Society
- 作者Sharangpani, Rahul; Tay, Sing-Pin
- 卷第148卷
- 期第1期
- 印刷ISSN0013-4651
- 文件大小160.37KB
- 发表时间2001
- DOI10.1149/1.1344553
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